УДК 681.786: 621.836
V. S. Antonоjuk, A.V. Prikhodko
TO STUDY HOW MICROMANIPULATION SYSTEM WORK AT THE NANOSCALE
The present-day level of science that is closely involved in nanotechnology requires special instruments, which could control the movement at the nanoscale. Today, these functions are performed by the micro- and nanomanipulators, based piezoelectric motors that have unique technical features and are ideal for working on nanodisplacement. This article is devoted to the study of some properties of the piezoelectric motor and its impact on the overall performance micromanipulation system, as well as research nanodisplacement that are able to ask a modern micromanipulator. To study the dynamic model is used nanodisplacement micromanipulation system that takes into account all the important design features and allows you to explore nanodisplacement output manipulator based on the parameters of the motor. Obtained from the dynamic model results have a high convergence with experimental in microrange and some divergence in the nanoscale that explains the features of the manipulator. Because of this we found out that the smallest movement that can provide micromanipulation system based on piezoelectric motor is 4 nm.
Keywords: micromanipulator, piezoelectric motor, guide, nanodisplacement, dynamic model.
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